Environmentally Acceptable Photoresist Processing for

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Manufacturers moved to smaller design rules and cleaner fabrication facilities, so that they could make chips with more transistors and maintain adequate yield. At this point, the individual ICs are tested for electrical function. 11 The thin wafer is like a piece of glass. We therefore expect that by moving towards longer nanomechanical resonators the mechanical Q-factors in our waveguide resonators may also be further improved. In 1958 and 1959, Jack Kilby at Texas Instruments and Robert Noyce at Fairchild Camera, came up with a solution to the problem of large numbers of components, and the integrated circuit was developed.

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Publisher: PN (1995)


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